Tilmaamaha ugu muhiimsan:
1. Iska caabbinta oksaydhka heerkulka sare:
caabbinta oksaydhisku weli aad bay u wanaagsan tahay marka heerkulku gaadho 1600 C.
2. Nadiifin sare: oo ay samaysay uumiga kiimikaad ee hoos yimaada xaalad koloriineed heerkul sare ah.
3. Iska caabbinta nabaadguurka: adkaanta sare, dusha sare, qaybo yaryar.
4. Iska caabinta daxalka: acid, alkali, milix iyo reagents organic.
Tilmaamaha ugu muhiimsan eeDaboolka CVD-SIC
| Guryaha SiC-CVD | ||
| Dhismaha Crystal | FCC β wejiga | |
| Cufnaanta | g/cm³ | 3.21 |
| Adag | Vickers adag | 2500 |
| Cabirka Hadhuudhka | μm | 2 ~ 10 |
| Nadiifnimada Kiimikada | % | 99.99995 |
| Awoodda kulaylka | J·k-1 ·K-1 | 640 |
| Heerkulka Sublimation | ℃ | 2700 |
| Xoogga Felexural | MPa (RT 4-dhibcood) | 415 |
| Dhallinta Modul | Gpa (4pt laab, 1300 ℃) | 430 |
| Balaadhinta kulaylka (CTE) | 10-6K-1 | 4.5 |
| Dhaqdhaqaaqa kulaylka | (W/mK) | 300 |
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Qaybaha kala bar ee Qalabka SiC Epitaxial
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Walxaha Kululaynta ee MOCVD Substrate
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Susceptor Foosto Dahaarka leh ee SiC
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Ka-hortagga oksaydhaynta nadiifinta sare ee SiC dahaarka leh ee MOCVD
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Walax heerkulbeeg ah oo loogu talagalay oohinta carbide silicon
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Susceptor Graphite oo leh Dahaarka Silicon Carbide...