Buluug/cagaaran LED epitaxy oo ka socda semicera waxay bixisaa xalal-goynta wax soo saarka LED-ga waxqabadka sare leh. Loogu talagalay in lagu taageero hababka koritaanka epitaxial ee horumarsan, tignoolajiyada buluuga ah ee buluuga ah / cagaarka cagaaran ee semicera waxay xoojisaa hufnaanta iyo saxnaanta soo saarista LED-yada buluuga iyo cagaarka ah, oo muhiim u ah codsiyada kala duwan ee optoelectronic. Ka faa'iidaysiga casriga ah ee Si Epitaxy iyo SiC Epitaxy, xalkani wuxuu xaqiijinayaa tayada iyo cimri dhererka ugu fiican.
Habka wax soo saarka, MOCVD Susceptor ayaa door muhiim ah ka ciyaara, oo ay la socdaan qaybaha sida PSS Etching Carrier, ICP Etching Carrier, iyo RTP Carrier, kuwaas oo hagaajiya jawiga koritaanka epitaxial. Semicera's Blue/cagaaran LED epitaxy waxaa loogu talagalay inay bixiso taageero xasilloon oo loogu talagalay Susceptor LED Epitaxial Susceptor, Barel Susceptor, iyo Monocrystalline Silicon, hubinta soo saarista natiijooyin tayo sare leh oo joogto ah.
Nidaamkan epitaxy wuxuu muhiim u yahay abuurista Qaybaha Sawir-voltaic wuxuuna taageeraa codsiyada sida GaN ee SiC Epitaxy, hagaajinta guud ahaan waxtarka semiconductor. Haddi ay ahaan lahayd qaabaynta Susceptor Pancake ama loo isticmaalo habayn kale oo horumarsan, semicera's Blue/cagaaran LED epitaxy xalalka waxay bixiyaan waxqabad la isku halayn karo, ka caawinaya soosaarayaasha inay buuxiyaan baahida sii kordheysa ee qaybaha LED-yada tayada sare leh.
Tilmaamaha ugu muhiimsan:
1. Iska caabbinta oksaydhka heerkulka sare:
caabbinta oksaydhisku weli aad bay u wanaagsan tahay marka heerkulku uu gaadho 1600 C.
2. Nadiifin sare: oo ay samaysay uumiga kiimikaad ee hoos yimaada xaalad koloriineed heerkul sare ah.
3. Iska caabinta nabaadguurka: adkaanta sare, dusha sare, qaybo yaryar.
4. Iska caabinta daxalka: acid, alkali, milix iyo reagents organic.
Tilmaamaha ugu muhiimsan eeDaboolka CVD-SIC
| Guryaha SiC-CVD | ||
| Dhismaha Crystal | FCC β wejiga | |
| Cufnaanta | g/cm³ | 3.21 |
| Adag | Vickers adag | 2500 |
| Cabirka Hadhuudhka | μm | 2 ~ 10 |
| Nadiifnimada Kiimikada | % | 99.99995 |
| Awoodda kulaylka | J·k-1 ·K-1 | 640 |
| Heerkulka Sublimation | ℃ | 2700 |
| Xoogga Felexural | MPa (RT 4-dhibcood) | 415 |
| Dhallinta Modul | Gpa (4pt laab, 1300 ℃) | 430 |
| Balaadhinta kulaylka (CTE) | 10-6K-1 | 4.5 |
| Dhaqdhaqaaqa kulaylka | (W/mK) | 300 |
