TaC Coated Plate waa saxan khaas ah oo loogu talagalay in lagu isticmaalo hababka epitaxial SiC, oo si sax ah looga sameeyay walxo garaafeed oo tayo sare leh. Dusha sare waxaa si fiican loogu dahaadhay tantalum carbide (TaC), oo ah xarun caan ku ah nadiifnimadeeda iyo xooggeeda gaarka ah. Dahaarka TaC wuxuu kor u qaadaa adkaysiga saxanka iyo caabbinta heerkulka sare, taas oo ka dhigaysa mid ku habboon shuruudaha baahida ee hababka SiC epitaxial.
TaC-da-dahaarka leh ee cusub waa saxan khaas ah oo loogu talagalay in lagu isticmaalo hababka epitaxial SiC, oo si sax ah looga sameeyay walxo garaafeed tayo sare leh. Dusha sare ee TaC Dahaarka waxaa si taxadar leh loogu dahaadhay tantalum carbide (TaC), oo ah xarun caan ku ah nadiifnimadeeda iyo xooggeeda gaarka ah. waxay u adeegtaa sidii goob la isku halayn karo oo lagu qaado wafers inta lagu jiro marxaladaha kala duwan ee koritaanka epitaxial SiC. Saldhigeeda garaafka nadiifka ah ee sarreeya ayaa bixiya meel deggan oo aan firfircoonayn, halka daaha TaC ay ku darayso lakabka dheeraadka ah ee ilaalinta falcelinta kiimikada iyo xirashada.
SemixilliTaC Coated Plate waxaa loo habeeyey iyadoo loo eegayo shuruudaha gaarka ah ee macaamiisha, iyadoo la hubinayo waxqabadka ugu wanaagsan iyo la jaanqaadka nidaamkooda epitaxial SiC. Haddi ay tahay cabbirka, qaabka, ama tilmaamo kale, taarikadan waxa loo habeeyey si ay u daboolaan baahiyaha gaarka ah ee codsi kasta.
leh iyo la'aanteed TaC
Kadib isticmaal TaC (midig)
Intaa waxaa dheer, Semicera'sAlaabta ku dahaaran TaCmuuji nolol adeeg dheer iyo iska caabin heerkul sare oo weyn marka la barbar dhigoDahaarka SiC.Cabbirrada shaybaadhka ayaa muujiyay in ourDahaarka TaCwaxay si joogto ah u samayn kartaa heerkul ah ilaa 2300 darajo Celsius muddo dheer. Hoos waxaa ku yaal tusaalooyin tusaalayaal ah:
