Silicon on Wafers Insulator

Sharaxaad Gaaban:

Semicera's Silicon-on-Insulator wafers ayaa bixiya xalal waxqabad sare leh codsiyada semiconductor sare. Ku habboon MEMS, dareemayaasha, iyo microelectronics, mareegahani waxay bixiyaan go'doomin koronto oo heer sare ah iyo awood yar oo dulin ah. Semicera waxay hubisaa wax soo saarka saxda ah, bixinta tayada joogtada ah ee tignoolajiyada cusub ee kala duwan. Waxaan rajeyneynaa inaan noqono lammaanahaaga muddada-dheer ee Shiinaha.


Faahfaahinta Alaabta

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Silicon on Wafers InsulatorSemicera waxaa loogu talagalay in lagu daboolo baahida sii kordheysa ee xalalka semiconductor ee waxqabadka sare leh. Waferradayada SOI-ga waxay bixiyaan waxqabad koronto oo heersare ah iyo hoos u dhigidda awoodda qalabka dulin, taasoo ka dhigaysa inay ku habboon yihiin codsiyada horumarsan sida aaladaha MEMS, dareemayaasha, iyo wareegyada isku dhafan. Khibradda Semicera ee wax soo saarka waferka ayaa hubinaysa in mid walbaSOI waferwaxay ku siinaysaa natiijooyin la isku halayn karo, tayo sare leh oo loogu talagalay baahidaada tignoolajiyada jiilka soo socda.

OurSilicon on Wafers InsulatorBixi dheelitirka ugu fiican ee u dhexeeya waxtarka-wax-ku-oolnimada iyo waxqabadka. Iyada oo qiimaha waferka soi uu noqdo mid tartan sii kordhaya, waferradan ayaa si weyn loogu isticmaalaa warshado kala duwan, oo ay ku jiraan microelectronics iyo optoelectronics. Habka wax-soo-saarka saxda ah ee Semicera wuxuu dammaanad qaadayaa isku-xidhnaanta wafer-ka sare iyo isku-duubnida, taasoo ka dhigaysa inay ku habboon yihiin codsiyo kala duwan, laga bilaabo maraqyada SOI ee daloolka ilaa maraqa silikoon caadiga ah.

Astaamaha Muhiimka ah:

Wafers SOI oo tayo sare leh ayaa loogu hagaajiyay waxqabadka MEMS iyo codsiyada kale.

Qiimaha waferka soi ee tartanka ah ee ganacsiyada raadinaya xalal horumarsan iyada oo aan tayada wax u dhimayn.

Ku habboon tignoolajiyada casriga ah, oo siinaya go'doomin koronto oo la xoojiyay iyo hufnaanta silikoon ee nidaamyada dahaadhka.

OurSilicon on Wafers Insulatorwaxaa loo farsameeyay si ay u bixiyaan xalal waxqabad sare leh, taageeraya mawjada soo socota ee hal-abuurka ee tignoolajiyada semiconductor. Haddii aad ka shaqaynayso daloolWafers SOI, Aaladaha MEMS, ama silikoon ee qaybaha dahaadhka, Semicera waxay soo bandhigtaa wafers oo buuxiya heerarka ugu sarreeya ee warshadaha.

Walxaha

Wax soo saar

Cilmi baaris

nacasnimo

Qiyaasta Crystal

Noocyo badan

4H

Khaladka jihaynta dusha sare

<11-20>4±0.15°

Halbeegyada Korontada

Dopant

n-nooca Nitrogen

iska caabin

0.015-0.025ohm · cm

Halbeegyada Makaanikada

Dhexroorka

150.0 ± 0.2mm

Dhumucda

350± 25 μm

Hanuuninta fidsan ee aasaasiga ah

[1-100]±5°

Dhererka siman ee aasaasiga ah

47.5 ± 1.5mm

Dabaqa labaad

Midna

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Qaansada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Wajiga hore (Si-wejiga) qallafsanaanta (AFM)

Ra≤0.2nm (5μm*5μm)

Qaab dhismeedka

Cufnaanta tuubbada yar

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Wasakhda birta

≤5E10atom/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Tayada hore

Hore

Si

Dhammaadka dusha sare

Si-wejiga CMP

Qaybaha

≤60ea/wafer (xajmiga≥0.3μm)

NA

xoqid

≤5ea/mm Dhererka isugeynta ≤ Dhexroorka

Dhererka isugeynta≤2* Dhexroor

NA

Diirka liimiga ah/gomayska/ wasakhowga/ dildilaaca/ wasakhowga

Midna

NA

Chips-ka-geeska/indents/jabka/taargada hex

Midna

Aagagga nooca badan

Midna

Aagga isugeynta≤20%

Aagga isugeynta≤30%

Calaamadaynta laysarka hore

Midna

Tayada dambe

Dhammaadka dhabarka

C-waji CMP

xoqid

≤5ea/mm, Dhererka isugeynta≤2* Dhexroor

NA

Cilladaha dhabarka (dhab-jeexyada geesaha)

Midna

Dhabar xumada

Ra≤0.2nm (5μm*5μm)

Calaamadaynta laser-ka dambe

1 mm (laga bilaabo cidhifka sare)

Cidhif

Cidhif

Chamfer

Baakadaha

Baakadaha

Epi-diyaar ah oo leh baakad vacuum ah

Baakadaha cajaladaha wafer-ka badan

* Xusuusin: "NA" macnaheedu waa codsi la'aan Waxyaabaha aan la sheegin waxay tixraaci karaan SEMI-STD.

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SiC wafers

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