Silicon Carbide Epitaxy

Sharaxaad Gaaban:

Silicon Carbide Epitaxy- Lakabyada epitaxial oo tayo sare leh oo loogu talagalay codsiyada semiconductor-ka horumarsan, oo bixiya waxqabadka sare iyo isku halaynta korantada korantada iyo aaladaha indhaha.


Faahfaahinta Alaabta

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Semicera'sSilicon Carbide Epitaxywaxaa loo habeeyay si uu u daboolo baahida adag ee codsiyada semiconductor-ka casriga ah. Anagoo adeegsanayna farsamooyinka koritaanka epitaxial ee horumarsan, waxaan hubineynaa in lakabka carbide silicon kasta uu muujiyo tayada kristalin gaar ah, lebis, iyo cufnaanta cilladda ugu yar. Tilmaamahani waxay muhiim u yihiin horumarinta qalabka elektaroonigga ah ee waxqabadka sare leh, halkaasoo waxtarka iyo maareynta kulaylku ay muhiim u yihiin.

TheSilicon Carbide Epitaxyhabka Semicera waxaa loo habeeyay si loo soo saaro lakabyo epitaxial leh dhumuc gaar ah iyo xakameyn doping, hubinta waxqabadka joogtada ah ee dhammaan qalabyada kala duwan. Heerkan saxda ah ayaa lagama maarmaan u ah codsiyada gawaarida korontada, nidaamyada tamarta dib loo cusboonaysiin karo, iyo isgaarsiin joogto ah, halkaasoo isku halaynta iyo hufnaanta ay muhiim u yihiin.

Intaa waxaa dheer, Semicera'sSilicon Carbide Epitaxywaxay bixisaa korantada kulaylka oo la xoojiyey iyo koronto burbursan oo sarreeya, taasoo ka dhigaysa doorashada la doorbido ee aaladaha ku shaqeeya xaaladaha daran. Guryahaani waxay gacan ka geystaan ​​cimriga aaladda oo sii dheeraato waxayna wanaajisay hufnaanta guud ee nidaamka, gaar ahaan meelaha tamarta sare leh iyo heerkulka sare.

Semicera sidoo kale waxay bixisaa ikhtiyaar u habeyntaSilicon Carbide Epitaxy, u oggolaanaya xalal ku habboon oo buuxiya shuruudaha qalabka gaarka ah. Hadday tahay cilmi-baadhis ama wax-soo-saar ballaadhan, lakabyadayada epitaxial-ka waxaa loogu talagalay inay taageeraan jiilka soo socda ee hal-abuurka semiconductor, awood u siinaya horumarinta qalab elektaroonig ah oo awood badan, hufan, oo la isku halleyn karo.

Iyadoo la isku darayo tignoolajiyada casriga ah iyo hababka xakamaynta tayada adag, Semicera waxay hubisaa in ourSilicon Carbide Epitaxyalaabtu kaliya ma buuxin ee waxay ka sarreeyaan heerarka warshadaha. Ballanqaadkan heer sare ah wuxuu ka dhigayaa lakabyadayada epitaxial aasaaska ugu habboon ee codsiyada semiconductor-ka horumarsan, taasoo u gogol xaareysa horumarrada laga gaarayo korantada korantada iyo optoelectronics.

Walxaha

Wax soo saar

Cilmi baaris

nacasnimo

Qiyaasta Crystal

Noocyo badan

4H

Khaladka jihaynta dusha sare

<11-20>4±0.15°

Qiyaasta Korontada

Dopant

n-nooca Nitrogen

iska caabin

0.015-0.025ohm · cm

Halbeegyada Makaanikada

Dhexroorka

150.0 ± 0.2mm

Dhumucda

350± 25 μm

Hanuuninta fidsan ee aasaasiga ah

[1-100]±5°

Dhererka siman ee aasaasiga ah

47.5 ± 1.5mm

Dabaqa labaad

Midna

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Qaansada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Wajiga hore (Si-wejiga) qallafsanaanta (AFM)

Ra≤0.2nm (5μm*5μm)

Qaab dhismeedka

Cufnaanta tuubbada yar

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Wasakhda birta

≤5E10atom/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Tayada hore

Hore

Si

Dhammaadka dusha sare

Si-wejiga CMP

Qaybaha

≤60ea/wafer (xajmiga≥0.3μm)

NA

xoqid

≤5ea/mm Dhererka isugeynta ≤ Dhexroorka

Dhererka isugeynta≤2* Dhexroor

NA

Diirka liimiga ah/gomayska/ wasakhowga/ dildilaaca/ wasakhowga

Midna

NA

Chips-ka-geeska/indents/jabka/taargada hex

Midna

Aagagga nooca badan

Midna

Aagga isugeynta≤20%

Aagga isugeynta≤30%

Calaamadaynta laysarka hore

Midna

Tayada dambe

Dhammaadka dhabarka

C-waji CMP

xoqid

≤5ea/mm, Dhererka isugeynta≤2* Dhexroor

NA

Cilladaha dhabarka (dhab-jeexyada geesaha)

Midna

Dhabar xumada

Ra≤0.2nm (5μm*5μm)

Calaamadaynta laser-ka dambe

1 mm (laga bilaabo cidhifka sare)

Cidhif

Cidhif

Chamfer

Baakadaha

Baakadaha

Epi-diyaar ah oo leh baakad vacuum ah

Baakadaha cajaladaha wafer-ka badan

* Xusuusin: "NA" macnaheedu waa codsi la'aan Waxyaabaha aan la sheegin waxay tixraaci karaan SEMI-STD.

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SiC wafers

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