Sida Substrate

Sharaxaad Gaaban:

Iyada oo saxankeeda sare iyo nadiifnimadeeda sare, Semicera's Si Substrate waxay hubisaa waxqabadka la isku halayn karo oo joogto ah ee codsiyada muhiimka ah, oo ay ku jiraan Epi-Wafer iyo Gallium Oxide (Ga2O3). Naqshadeynta si ay u taageerto wax soo saarka microelectronics horumarsan, substrate-kani wuxuu bixiyaa iswaafajin gaar ah iyo xasillooni, taasoo ka dhigaysa shay lagama maarmaan u ah tignoolajiyada casriga ah ee isgaarsiinta, baabuurta, iyo qaybaha warshadaha.


Faahfaahinta Alaabta

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Substrate-ka loo yaqaan 'Substrate' ee Semicera waa qayb muhiim u ah soo saarista aaladaha semiconductor ee waxqabadka sarreeya. Waxa laga farsameeyay Silicon (Si), substrate-kani waxa uu bixiyaa lebis gaar ah, degenaansho, iyo firfircooni aad u wanaagsan, taas oo ka dhigaysa mid ku habboon codsiyo kala duwan oo horumarsan warshadaha semiconductor. Haddii loo isticmaalo Si Wafer, Substrate SiC, SOI Wafer, ama Soosaarka Substrate-ka SiN, Semicera Si Substrate wuxuu bixiyaa tayo joogto ah iyo waxqabad heersare ah si loo daboolo baahida sii kordheysa ee elektiroonigga casriga ah iyo sayniska agabka.

Waxqabad Aan La Barbar dhigin oo leh daahir Sare iyo Saxnimo

Semicera's Si Substrate waxaa la soo saaray iyadoo la adeegsanayo habab horumarsan oo hubinaya nadiif sare iyo kontoroolka cabbirka adag. Substrate-ku wuxuu u adeegaa sidii aasaaska soo saarista noocyo kala duwan oo agab wax qabad sare leh, oo ay ku jiraan Epi-Wafers iyo AlN Wafers. Saxnaanta iyo labisnaanta Si Substrate-ka ayaa ka dhigaya doorasho aad u fiican abuurista lakabyada epitaxial-filim khafiif ah iyo qaybaha kale ee muhiimka ah ee loo isticmaalo soo saarista jiilka soo socda ee semiconductors. Haddii aad la shaqaynayso Gallium Oxide (Ga2O3) ama walxo kale oo horumarsan, Semicera's Si Substrate waxay hubisaa heerarka ugu sarreeya ee isku halaynta iyo waxqabadka.

Codsiyada wax soo saarka Semiconductor

Warshadaha semiconductor-ka, Si Substrate-ka ee Semicera waxaa loo adeegsadaa codsiyo kala duwan, oo ay ku jiraan Si Wafer iyo SiC Substrate wax soo saarka, halkaas oo ay ku siiso saldhig xasiloon, oo la isku halayn karo ee dhigista lakabyada firfircoon. Substrate-ku wuxuu door muhiim ah ka ciyaaraa samaynta SOI Wafers (Silicon On Insulator), kuwaas oo lagama maarmaan u ah microelectronics horumarsan iyo wareegyada isku dhafan. Intaa waxaa dheer, Epi-Wafers (wafers epitaxial) oo lagu dhisay Si Substrates ayaa ka mid ah soo saarista aaladaha semiconductor-ka waxqabadka sare leh sida transistor-ka korantada, diodes, iyo wareegyada isku dhafan.

Si Substrate-ka waxa kale oo uu taageeraa soo saarista aaladaha isticmaalaya Gallium Oxide (Ga2O3), oo ah walxo baladhan oo baladhan oo loo isticmaalo codsiyada awooda sare leh ee korontada ku shaqeeya. Intaa waxaa dheer, waafaqid Semicera's Si Substrate oo leh AlN Wafers iyo substrates kale oo horumarsan waxay hubisaa inay buuxin karto shuruudaha kala duwan ee warshadaha teknolojiyadda sare, taasoo ka dhigaysa xalka ugu habboon soo saarista aaladaha cirifka leh ee isgaarsiinta, baabuurta, iyo qaybaha warshadaha. .

Lagu Kalsoon yahay oo Tayada Joogta ah ee Codsiyada Farsamada Sare

Substrate-ka ee Semicera waxaa si taxadar leh loo farsameeyay si uu u daboolo baahida adag ee soo saarista semiconductor. Sharafteeda qaabdhismeed ee gaarka ah iyo guryaha tayada sare leh ayaa ka dhigaya sheyga ugu habboon ee loo isticmaalo nidaamyada cajaladaha ee gaadiidka waferka, iyo sidoo kale abuurista lakabyo sax ah oo sax ah oo ku jira aaladaha semiconductor. Awoodda substrate-ka ee lagu ilaalinayo tayada joogtada ah ee xaaladaha nidaamka kala duwan waxay hubisaa cilladaha ugu yar, kor u qaadista wax-soo-saarka iyo waxqabadka badeecada ugu dambeysa.

Iyada oo kuleylkeeda sare ee kuleylka, xoogga farsamada, iyo nadiifnimada sare, Semicera's Si Substrate waa shayga doorashada ee soosaarayaasha raadinaya si ay u gaaraan heerarka ugu sarreeya ee saxda ah, isku halaynta, iyo waxqabadka wax soo saarka semiconductor.

Dooro Substrate-ka Semicera's Si loogu talagalay nadiif-sare, xalalka waxqabadka sare

Soosaarayaasha warshadaha semiconductor-ka, Substrate-ka Si Substrate-ka ee Semicera wuxuu bixiyaa xal tayo sare leh oo adag oo loogu talagalay codsiyo badan oo kala duwan, laga bilaabo soosaarka Si Wafer ilaa abuurista Epi-Wafers iyo SOI Wafers. Iyada oo nadiif ah, sax ah, iyo isku haleyn la'aan, substrate-kani wuxuu awood u siinayaa wax soo saarka qalabka semiconductor-ka-goynta, hubinta waxqabadka muddada-dheer iyo waxtarka ugu fiican. U dooro Semicera baahidaada Si substrate-ka, oo ku kalsoonow badeecada loo qaabeeyey si loo daboolo baahida tignoolajiyada berrito.

Walxaha

Wax soo saar

Cilmi baaris

nacasnimo

Qiyaasta Crystal

Noocyo badan

4H

Khaladka jihaynta dusha sare

<11-20>4±0.15°

Halbeegyada Korontada

Dopant

n-nooca Nitrogen

iska caabin

0.015-0.025ohm · cm

Halbeegyada Makaanikada

Dhexroorka

150.0 ± 0.2mm

Dhumucda

350± 25 μm

Hanuuninta fidsan ee aasaasiga ah

[1-100]±5°

Dhererka siman ee aasaasiga ah

47.5 ± 1.5mm

Dabaqa labaad

Midna

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Qaansada

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Wajiga hore (Si-wejiga) qallafsanaanta (AFM)

Ra≤0.2nm (5μm*5μm)

Qaab dhismeedka

Cufnaanta tuubbada yar

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Wasakhda birta

≤5E10atom/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Tayada hore

Hore

Si

Dhammaadka dusha sare

Si-wejiga CMP

Qaybaha

≤60ea/wafer (xajmiga≥0.3μm)

NA

xoqid

≤5ea/mm Dhererka isugeynta ≤ Dhexroorka

Dhererka isugeynta≤2* Dhexroor

NA

Diirka liimiga ah/gomayska/ wasakhowga/ dildilaaca/ wasakhowga

Midna

NA

Chips-ka-geeska/indents/jabka/taargada hex

Midna

Aagagga nooca badan

Midna

Aagga isugeynta≤20%

Aagga isugeynta≤30%

Calaamadaynta laysarka hore

Midna

Tayada dambe

Dhammaadka dhabarka

C-waji CMP

xoqid

≤5ea/mm, Dhererka isugeynta≤2* Dhexroor

NA

Cilladaha dhabarka (dhab-jeexyada geesaha)

Midna

Dhabar xumada

Ra≤0.2nm (5μm*5μm)

Calaamadaynta laser-ka dambe

1 mm (laga bilaabo cidhifka sare)

Cidhif

Cidhif

Chamfer

Baakadaha

Baakadaha

Epi-diyaar ah oo leh baakad vacuum ah

Baakadaha cajaladaha wafer-ka badan

* Xusuusin: "NA" macnaheedu waa codsi la'aan Waxyaabaha aan la sheegin waxay tixraaci karaan SEMI-STD.

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SiC wafers

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