Semicerasoo bandhigayaCassette Semiconductor, qalab lagama maarmaan u ah si ammaan ah oo wax ku ool ah loo maareeyo waferrada inta lagu jiro habka wax soo saarka semiconductor. Lagu farsameeyay si sax ah oo aad u saraysa, cajaladdani waxay hubisaa in maraqyadaada si badbaado leh loo kaydiyo loona raro, iyada oo ilaalinaysa daacadnimadooda marxalad kasta.
Ilaalinta Sare iyo WaartaTheCassette SemiconductorSemicera waxaa loo dhisay inay bixiso ilaalinta ugu badan ee weelashaada. Laga soo dhisay walxo adag oo wasakhda u adkaysta, waxay ka ilaalisaa xabaglahaaga waxyeelada iman karta iyo wasakhaynta, taas oo ka dhigaysa doorasho ku habboon deegaan nadiif ah. Naqshadeynta cajaladdu waxay yaraynaysaa jiilka qayb ka mid ah waxayna hubisaa in canjeeradu ay ahaato mid aan la taaban oo ammaan ah inta lagu jiro maaraynta iyo gaadiidka.
Nakhshad La Wanaajiyey ee Waxqabadka Ugu FiicanSemicera'sCassette Semiconductorwaxay leedahay naqshad si heer sare ah loo habeeyay oo bixisa toosin saxan oo wafer ah, taasoo yaraynaysa khatarta qallafsanaanta iyo burburka farsamada. Meelaha cajaladaha ah ayaa si fiican u kala fogaaday si ay u xajiyaan wafer kasta si ammaan ah, iyaga oo ka hortagaya dhaqdhaqaaq kasta oo keeni kara xagtin ama cillado kale.
Wax-qabad iyo WaafaqidTheCassette Semiconductorwaa wax badan oo ku habboon cabbirro kala duwan oo wafer ah, taas oo ka dhigaysa mid ku habboon marxaladaha kala duwan ee soo-saarka semiconductor. Haddi aad ku shaqaynayso cabbirka wafer-ka caadiga ah ama caadadii, cajaladani waxa ay la qabsanaysaa baahiyahaaga, oo ku siinaya dabacsanaan habka wax soo saarkaaga.
Wax ka qabashada iyo Hufnaanta HabboonNaqshadeeyay iyadoo maskaxda lagu hayo isticmaalaha,Semicera Semiconductor CassetteMiisaankiisu waa fudud yahay oo si sahlan loo maarayn karo, taas oo u oggolaanaysa in si degdeg ah oo hufan loo raro loona dejiyo. Naqshadaan ergonomic ma aha oo kaliya inay badbaadiso waqtiga laakiin sidoo kale waxay yaraynaysaa halista qaladka bini'aadamka, hubinta hawlgallada siman ee xaruntaada.
La kulanka Heerarka WarshadahaSemicera waxay hubisaa inCassette Semiconductorbuuxiyey heerarka warshadaha ugu sarreeya tayada iyo isku halaynta. Cajalad kastaa waxa ay martaa tijaabin adag si loo dammaanad qaado in ay si joogto ah u qabato xaaladaha u baahan wax-soo-saarka semiconductor. U heellanaanta tayada waxay hubisaa in waferradaada mar walba la ilaaliyo, iyadoo la ilaalinayo heerarka sare ee looga baahan yahay warshadaha.
Walxaha | Wax soo saar | Cilmi baaris | nacasnimo |
Qiyaasta Crystal | |||
Noocyo badan | 4H | ||
Khaladka jihaynta dusha sare | <11-20>4±0.15° | ||
Halbeegyada Korontada | |||
Dopant | n-nooca Nitrogen | ||
iska caabin | 0.015-0.025ohm · cm | ||
Halbeegyada Makaanikada | |||
Dhexroorka | 150.0 ± 0.2mm | ||
Dhumucda | 350± 25 μm | ||
Hanuuninta fidsan ee aasaasiga ah | [1-100]±5° | ||
Dhererka siman ee aasaasiga ah | 47.5 ± 1.5mm | ||
Dabaqa labaad | Midna | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm (5mm*5mm) | ≤5 μm (5mm*5mm) | ≤10 μm (5mm*5mm) |
Qaansada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Wajiga hore (Si-wejiga) qallafsanaanta (AFM) | Ra≤0.2nm (5μm*5μm) | ||
Qaab dhismeedka | |||
Cufnaanta tuubbada yar | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Wasakhda birta | ≤5E10atom/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tayada hore | |||
Hore | Si | ||
Dhammaadka dusha sare | Si-wejiga CMP | ||
Qaybaha | ≤60ea/wafer (xajmiga≥0.3μm) | NA | |
xoqid | ≤5ea/mm Dhererka isugeynta ≤ Dhexroorka | Dhererka isugeynta≤2* Dhexroor | NA |
Diirka liimiga ah/gomayska/ wasakhowga/ dildilaaca/ wasakhowga | Midna | NA | |
Chips-ka-geeska/indents/jabka/taargada hex | Midna | ||
Aagagga nooca badan | Midna | Aagga isugeynta≤20% | Aagga isugeynta≤30% |
Calaamadaynta laysarka hore | Midna | ||
Tayada dambe | |||
Dhammaadka dhabarka | C-waji CMP | ||
xoqid | ≤5ea/mm, Dhererka isugeynta≤2* Dhexroor | NA | |
Cilladaha dhabarka (dhab-jeexyada geesaha) | Midna | ||
Dhabar xumada | Ra≤0.2nm (5μm*5μm) | ||
Calaamadaynta laser-ka dambe | 1 mm (laga bilaabo cidhifka sare) | ||
Cidhif | |||
Cidhif | Chamfer | ||
Baakadaha | |||
Baakadaha | Epi-diyaar ah oo leh baakad vacuum ah Baakadaha cajaladaha wafer-ka badan | ||
* Xusuusin: "NA" macnaheedu waa codsi la'aan Waxyaabaha aan la sheegin waxay tixraaci karaan SEMI-STD. |