Shirkaddayadu waxay bixisaaDahaarka SiCadeegyada habka dusha sare ee graphite, ceramics iyo qalabka kale ee habka CVD, si gaasas gaar ah oo ay ku jiraan kaarboon iyo Silicon falcelin karaan heerkulka sare si ay u helaan-nadiifinta sare Sic molecules, kaas oo lagu shubo karaa on dusha alaabta dahaarka ah si ay u sameeyaan aLakabka ilaalinta SiCfoosto epitaxy nooca hy pnotic.
Tilmaamaha ugu muhiimsan:
1. Nadiifinta sare ee SiC garaafyada dahaarka leh
2. Iska caabbinta kulaylka sare iyo isku midnimada kulaylka
3. FiicanSiC crystal dahaarka lehdusha siman
4. Adkeysiga sare ee nadiifinta kiimikada
Tilmaamaha ugu muhiimsan eeDaboolka CVD-SIC
| Guryaha SiC-CVD | ||
| Dhismaha Crystal | FCC β wejiga | |
| Cufnaanta | g/cm³ | 3.21 |
| Adag | adkaanta Vickers | 2500 |
| Cabirka Hadhuudhka | μm | 2 ~ 10 |
| Nadiifnimada Kiimikada | % | 99.99995 |
| Awoodda kulaylka | J·k-1 ·K-1 | 640 |
| Heerkulka Sublimation | ℃ | 2700 |
| Xoogga Felexural | MPa (RT 4-dhibcood) | 415 |
| Dhallinta Modul | Gpa (4pt laab, 1300 ℃) | 430 |
| Balaadhinta kulaylka (CTE) | 10-6K-1 | 4.5 |
| Dhaqdhaqaaqa kulaylka | (W/mK) | 300 |
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