Sababaha ugu muhiimsan ee saameeya isku midka ah ee iska caabbinta shucaaca ee hal crystals waa flatness ee interface-dareere adag iyo saamaynta diyaaradda yar inta lagu jiro koritaanka crystal.
Saamaynta flatness ee interface adag-dareere Inta lagu jiro koritaanka crystal, haddii dhalaalaysaa si siman u kiciyey, dusha iska caabin siman waa interface adag-dareere ah (fiirsashada wasakh ah ee dhalaalisaa ka duwan yahay fiirsashada wasakh ah ee crystal ah, sidaas darteed. iska caabintu way ka duwan tahay, iska caabintuna waxay la mid tahay oo kaliya interface-ka dareeraha adag). Marka nijaasta K<1, interface convex si dhalaalaysa waxay keeni doontaa iska caabin radial in ay sare ee dhexe iyo hoose ee cidhifka, halka interface concave si dhalaalid waa ka soo horjeeda. Labbiska iska caabbinta shucaaca ee isku xirka dareeraha adag ee fidsan ayaa ka wanaagsan. Qaabka dhexdhexaadiyaha dareeraha adag inta lagu jiro jiidashada crystal waxaa lagu go'aamiyaa arrimo ay ka mid yihiin qaybinta goobta kulaylka iyo xuduudaha hawlgalka koritaanka crystal. Mid ka mid ah muraayadda tooska ah ee toosan, qaabka dusha sare ee dareeraha adag ayaa ah natiijada saameynta isku dhafan ee arrimaha sida qaybinta heerkulka foornada iyo kuleylka kuleylka.
Marka la jiido crystals, waxaa jira afar nooc oo kulaylka ugu weyn ee isweydaarsiga dareeraha adag:
Kulaylka daahsoon ee isbeddelka wejiga ee lagu sii daayo xoojinta silikoon dhalaalaysa
Qabashada kulaylka dhalaalida
Kulaylka kor u qaadida iyada oo loo marayo crystal
Shucaaca dibadda kulaylka iyada oo loo marayo crystal
Kulaylka dahsoon ayaa labis u ah interface-ka oo dhan, cabbirkiisuna isma beddelo marka heerka korriinka uu joogto yahay. (Kuleylka degdega ah, qaboojinta degdega ah, iyo korodhka heerka adkaynta)
Marka madaxa kristanta koraya uu ku dhow yahay usha abuurka biyaha qaboojiyey ee foornada kiristaalka ah, heerkulka heerkulku waa weyn yahay, taas oo ka dhigaysa socodka kulaylka dheer ee crystal ka weyn kulaylka shucaaca dusha, sidaas darteed Interface dareere adag convex si ay dhalaaliso.
Marka kareemku u kordho dhexda, socodka kulaylka dhererka wuxuu la mid yahay kulaylka shucaaca dusha sare, markaa is-dhexgalku waa toosan yahay.
Daboolka muraayadda, kuleyliyaha kuleylku waa uu ka yar yahay kulaylka shucaaca dusha sare, taasoo ka dhigaysa is-dhexgalka dareeraha adag ee isku dhejinaya dhalaalka.
Si loo helo hal crystal oo leh iska caabin shucaac isku mid ah, isku xirka dareeraha adag waa in la simo.
Hababka la isticmaalo waa: ① Hagaaji nidaamka kulaylka koritaanka crystal si loo yareeyo gradient heerkulka radial ee goobta kulaylka.
② Hagaajin cabbirrada hawlgalka jiidashada crystal. Tusaale ahaan, convex interface si dhalaalka, kordhiso xawaaraha jiidashada si loo kordhiyo heerka adkaynta crystal. Waqtigaan, sababtoo ah kororka kulaylka daahsoon ee crystallization ee lagu sii daayo interface-ka, heerkulka dhalaalka ee u dhow interface ayaa kor u kaca, taas oo keentay dhalaalidda qayb ka mid ah crystallation at interface, samaynta interface ka mid siman. Taas bedelkeeda, haddii korriinka korriinka uu u janjeero dhinaca dhalaalka, heerka kobaca waa la dhimi karaa, dhalaalkuna wuxuu adkeyn doonaa mugga u dhigma, taasoo ka dhigaysa is-dhexgalka koritaanka mid siman.
③ Hagaajin xawaaraha wareega ee crystal ama crucible. Kordhinta xawaaraha wareega wareega ee crystal waxay kordhin doontaa socodka dareeraha heerkulka sare ee ka socda hoos ilaa sare ee dhexdhexaadiyaha dareeraha adag, taas oo ka dhigaysa is-dhexgalka isbeddelka convex ilaa concave. Jihada dareeraha dareeraha ah ee uu keeno wareegga qulqulka ayaa la mid ah kan dabiiciga ah ee dabiiciga ah, saameyntuna waxay si buuxda uga soo horjeedaa wareegga crystal.
④ Kordhinta saamiga dhexroorka dhexroorka dhexroorka dhexroorka dhexroorka kiristaanku wuxuu sixi doonaa isku-xidhka dareeraha adag, waxayna sidoo kale yarayn kartaa cufnaanta kala-baxa iyo oksijiinta ku jirta crystal. Guud ahaan, dhexroorka crucible: dhexroor crystal = 3 ~ 2.5: 1.
Saamaynta saamaynta diyaaradda yar
Dhexdhexaadiyaha dareeraha adag ee koritaanka crystal inta badan wuu qalloocan yahay sababtoo ah xaddidaadda isotherm dhalaalka ah ee ku jira qashinka. Haddii kiristaanku si dhakhso ah kor loogu qaado inta lagu jiro koritaanka crystal, diyaarad yar oo fidsan ayaa ka soo muuqan doonta isku xirka dareeraha adag ee (111) germanium iyo silikoon hal kiristaalo. Waa (111) diyaarada atomiga ku dhow, oo badanaa loo yaqaan diyaarad yar.
Diiradda wasakhda ee aagga diyaaradda yar aad ayey uga duwan tahay tan aagga diyaaradda aan yareyn. Dhacdadan qaybinta aan caadiga ahayn ee wasakhda ee aagga diyaaradda yar waxaa loo yaqaannaa saamaynta diyaaradda yar.
Sababtoo ah saameynta yar ee diyaaradda, iska caabbinta aagga diyaaradda yar ayaa hoos u dhigi doonta, iyo xaaladaha daran, tuubooyinka wasakhaysan ayaa soo muuqan doona. Si loo baabi'iyo is-hortaag la'aanta radial-ka ee ay keento saameynta diyaaradda yar, is-dhexgalka dareeraha adag wuxuu u baahan yahay in la simo.
Ku soo dhawoow macaamiil kasta oo adduunka oo dhan ka yimid si ay noogu soo booqdaan dood dheeraad ah!
https://www.semi-cera.com/
https://www.semi-cera.com/tac-coating-monocrystal-growth-parts/
https://www.semi-cera.com/cvd-coating/
Waqtiga boostada: Jul-24-2024