Doonta Graphite Istatic PECVD

Doonta Garaafka ee Istatic PECVD Sawirka

Sharaxaad Gaaban:

Doonta garaafiga Isostatic PECVD waxaa si weyn loogu isticmaalaa in links kala duwan ee wax soo saarka semiconductor, sida dhigaalka polysilicon film, dhigaalka filimka oxide, dhigaalka film nitride, iwm Wax qabadkeeda aad u fiican ayaa ka dhigaysa sida wafer ku haboon habka PECVD.

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Faahfaahinta Alaabta

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SEMICERA isostatic PECVD garaafyada doonnida waa saafid sare, cufnaanta sare ee garaafyada loogu talagalay taageerada wafer ee habka PECVD (plasma xoojiyey kaydinta uumiga kiimikada). SEMICERA waxay isticmaashaa tignoolajiyada cadaadiska sare ee isostatic si ay u hubiso in doonta graphite ay leedahay iska caabin heerkul sare oo heersare ah, iska caabin daxalka, xasiloonida cabbirka iyo kulaylka wanaagsan, taas oo ah lagama maarmaanka u ah habka wax soo saarka semiconductor.

SEMICERA isostatic PECVD graphite doonta waxay leedahay faa'iidooyinka soo socda:

Nadiifin sare: Maaddada garaafyada waa nadiif sare waana nijaas hoose si looga fogaado wasakheynta dusha sare ee waferka.

Cufnaanta sare: Cufnaanta sare, xoogga farsamada sare, waxay u adkeysan kartaa heerkulka sare iyo jawiga faakuumka sare.

Xasilooni cabbir wanaagsan: Isbeddel cabbir yar oo heerkul sarreeya si loo hubiyo xasilloonida habka.

▪ Dhaqdhaqaaqa kulaylka oo aad u wanaagsan: Si wax ku ool ah u wareeji kulaylka si aad uga hortagto kulaylka waferka.

▪ Iska caabin daxalka adag: Awood u leh inuu iska caabiyo nabaadguurka gaasaska daxalka ee kala duwan iyo balaasmaha.

Halbeegga waxqabadka	semicera	SGL R6510	Halbeegga waxqabadka
Cufnaanta weyn (g/cm3)	1.91	1.83	1.85
Xoog laabashada (MPa)	63	60	49
Awood cadaadis (MPa)	135	130	103
Hardness Shore (HS)	70	64	60
Isku-dhafka balaarinta kulaylka (10-6/K)	85	105	130
Isku-dhafka balaarinta kulaylka (10-6/K)	5.85	4.2	5.0
Iska caabin (μΩm)	11-13	13	10

Faa'iidooyinka doorashada annaga:
Xulashada agabka: Qalabka garaafka saafiga ah ee sarreeya ayaa loo isticmaalaa si loo hubiyo tayada alaabta.
Tignoolajiyada farsamaynta: Cadaadiska isostatic waxa loo isticmaalaa si loo hubiyo cufnaanta badeecada iyo labbiska.
▪ Habaynta cabbirka: Doomaha sawir-gacmeedka ee cabbirka iyo qaababka kala duwan ayaa loo habeyn karaa iyadoo loo eegayo baahida macaamiisha.
▪ Daawaynta dusha sare: Hababka daawaynta dusha kala duwan ayaa la bixiyaa, sida dahaarka silikoon carbide, boron nitride, iwm., si loo buuxiyo shuruudaha nidaamka kala duwan.