Tantalum Carbide (TaC) Dahaarka Wafer Susceptor

Sharaxaad Gaaban:

Daahan Tantalum carbide waa tignoolajiyada dahaarka sare leh oo adeegsata walxo tantalum carbide si ay u samaysato lakab difaac adag oo xidhan oo u adkaysta daxalka dushiisa substrate-ka. Dahaarkani wuxuu leeyahay sifooyin aad u fiican oo si weyn u kordhiya adkaanta walxaha, caabbinta heerkulka sare iyo caabbinta kiimikada, iyada oo la yareeynayo isku dhaca iyo xirashada. Dahaarka Tantalum carbide waxaa si weyn loogu isticmaalaa meelo kala duwan, oo ay ku jiraan wax soo saarka warshadaha, aerospace, injineernimada baabuurta iyo qalabka caafimaadka, si loo kordhiyo nolosha alaabta, hagaajinta wax soo saarka iyo dhimista kharashka dayactirka. Haddi laga ilaaliyo sagxadaha birta ee daxalka ama kor u qaadida iska caabbinta xidhashada iyo iska caabinta oksaydhka ee qaybaha farsamada, dahaarka tantalum carbide waxay bixiyaan xal lagu kalsoonaan karo oo loogu talagalay codsiyada kala duwan.

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Faahfaahinta Alaabta

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Semicera waxay siisaa dahaarka tantalum carbide (TaC) ee khaaska ah ee qaybo kala duwan iyo sidayaal.Nidaamka dahaadhka hogaaminaya ee Semicera wuxuu awood u siinayaa dahaarka tantalum carbide (TaC) si loo gaaro nadiif sare, xasilooni heerkul sare ah iyo dulqaad kiimiko sare leh, hagaajinta tayada badeecada ee kiristaalo SIC/GAN iyo lakabyada EPISusceptor TaC dahaarka graphite), iyo kordhinta nolosha qaybaha muhiimka ah ee reactor. Isticmaalka daahan tantalum carbide TaC waa in la xaliyo dhibaatada cirifka iyo hagaajinta tayada kobaca crystal, iyo Semicera Semicera ayaa horumar ah xalliyo technology daahan carbide tantalum carbide (CVD), gaarey heerka sare ee caalamiga ah.

Sannado badan oo horumarineed ka dib, Semicera waxay ku guulaysatay tiknoolajiyadaCVD TaCiyadoo dadaalka wadajirka ah ee waaxda R&D. Cilladaha way fududahay in ay ku dhacaan habka koritaanka SiC wafers, laakiin ka dib marka la isticmaaloTaC, farqigu waa mid muhiim ah. Hoos waxaa ku yaal isbarbardhigga waferrada leh iyo la'aanta TaC, iyo sidoo kale qaybaha Simicera ee kobaca kareemka keliya

Qaybta tac ee koritaanka hal crystal

Dharka ka-hortagga dharka tantalum carbide dahaarka_ Waxay ka ilaalisaa qalabka xirashada iyo daxalka Sawirka sifaysan

Garaafka giraanta dahaarka leh ee TaC

leh iyo la'aanteed TaC

Kadib isticmaal TaC (midig)

Intaa waxaa dheer, nolosha adeegga ee alaabta daahan Semicera ee TaC waa ka dheer oo adkaysi u heerkulka sare ka SiC. Ka dib wakhti dheer oo xogta cabbiraadda shaybaadhka, TaC-gayagu waxa ay shaqayn kartaa wakhti dheer ugu badnaan 2300 darajo Celsius. Kuwa soo socda waa qaar ka mid ah muunadyadayada: