Semicera's 4 Inch N-nooca SiC Substrates waxaa loo sameeyay si ay ula kulmaan heerarka saxda ah ee warshadaha semiconductor. Substrates-yadani waxay bixiyaan aasaas waxqabad sare leh oo loogu talagalay codsiyo badan oo elektaroonig ah, oo bixiya dabeecad aan caadi ahayn iyo guryaha kulaylka.
N-nooca doping-ka ee substrate-yadan SiC waxay wanaajisaa dhaqdhaqaaqa korantada, taasoo ka dhigaysa inay si gaar ah ugu habboon yihiin codsiyada tamarta sare iyo kuwa soo noqnoqda. Gurigani wuxuu u oggolaanayaa in si hufan loogu shaqeeyo aaladaha sida diodes, transistors, iyo amplifiers, halkaas oo la yareeyo khasaaraha tamarta ay muhiim u tahay.
Semicera waxay isticmaashaa hababka wax soo saarka ee casriga ah si loo hubiyo in substrate kasta uu muujiyo tayada sare ee tayada sare leh iyo labbiska. Saxnimadani waxay muhiim u tahay codsiyada korantada elektiroonigga ah, aaladaha microwave-ka, iyo teknoolojiyadda kale ee u baahan waxqabad la isku halayn karo marka ay jiraan xaalado aad u daran.
Ku darista substrates-ka nooca SiC ee Semicera ee khadkaaga wax soo saarka macnaheedu waa ka faa'iidaysiga agabka bixiya kulaylka sareeyo iyo xasiloonida korantada. Substrate-yadani waxay ku habboon yihiin abuurista qaybo u baahan adkaysi iyo hufnaan, sida nidaamyada beddelka awoodda iyo cod-weyneyaasha RF.
Adigoo dooranaya Semicera's 4 Inch N-nooca SiC Substrates, waxaad maalgashanaysaa badeecad isku daraysa sayniska agabka cusub iyo farsamada farsamada. Semicera waxay sii wadaa hogaaminta warshadaha iyadoo siinaya xalal taageeraya horumarinta tignoolajiyada semiconductor-ka-goynta, hubinta waxqabadka sare iyo kalsoonida.
Walxaha | Wax soo saar | Cilmi baaris | nacasnimo |
Qiyaasta Crystal | |||
Noocyo badan | 4H | ||
Khaladka jihaynta dusha sare | <11-20>4±0.15° | ||
Halbeegyada Korontada | |||
Dopant | n-nooca Nitrogen | ||
iska caabin | 0.015-0.025ohm · cm | ||
Halbeegyada Makaanikada | |||
Dhexroorka | 150.0 ± 0.2mm | ||
Dhumucda | 350± 25 μm | ||
Hanuuninta fidsan ee aasaasiga ah | [1-100]±5° | ||
Dhererka siman ee aasaasiga ah | 47.5 ± 1.5mm | ||
Dabaqa labaad | Midna | ||
TTV | ≤5 μm | ≤10 μm | ≤15 μm |
LTV | ≤3 μm (5mm*5mm) | ≤5 μm (5mm*5mm) | ≤10 μm (5mm*5mm) |
Qaansada | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤35 μm | ≤45 μm | ≤55 μm |
Wajiga hore (Si-wejiga) qallafsanaanta (AFM) | Ra≤0.2nm (5μm*5μm) | ||
Qaab dhismeedka | |||
Cufnaanta tuubbada yar | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Wasakhda birta | ≤5E10atom/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Tayada hore | |||
Hore | Si | ||
Dhammaadka dusha sare | Si-wejiga CMP | ||
Qaybaha | ≤60ea/wafer (xajmiga≥0.3μm) | NA | |
xoqid | ≤5ea/mm Dhererka isugeynta ≤ Dhexroorka | Dhererka isugeynta≤2* Dhexroor | NA |
Diirka liimiga ah/gomayska/ wasakhowga/ dildilaaca/ wasakhowga | Midna | NA | |
Chips-ka-geeska/indents/jabka/taargada hex | Midna | ||
Aagagga nooca badan | Midna | Aagga isugeynta≤20% | Aagga isugeynta≤30% |
Calaamadaynta laysarka hore | Midna | ||
Tayada dambe | |||
Dhammaadka dhabarka | C-waji CMP | ||
xoqid | ≤5ea/mm, Dhererka isugeynta≤2* Dhexroor | NA | |
Cilladaha dhabarka (dhab-jeexyada geesaha) | Midna | ||
Dhabar xumada | Ra≤0.2nm (5μm*5μm) | ||
Calaamadaynta laser-ka dambe | 1 mm (laga bilaabo cidhifka sare) | ||
Cidhif | |||
Cidhif | Chamfer | ||
Baakadaha | |||
Baakadaha | Epi-diyaar ah oo leh baakad vacuum ah Baakadaha cajaladaha wafer-ka badan | ||
* Xusuusin: "NA" macnaheedu waa codsi la'aan Waxyaabaha aan la sheegin waxay tixraaci karaan SEMI-STD. |